Search results for "High-power impulse magnetron sputtering"

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High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere: The study of sputtering process and AZO films

2019

Financial support provided by Scientiﬁc Research Project for Students and Young Researchers Nr. SJZ/2017/4 realised at the Institute of Solid State Physics, University of Latvia is greatly acknowledged.

Materials scienceReactive sputteringAnalytical chemistryAl (AZO) films [ZnO]02 engineering and technology7. Clean energy01 natural sciencesSputteringElectrical resistivity and conductivity0103 physical sciencesMaterials ChemistryTransmittance:NATURAL SCIENCES:Physics [Research Subject Categories]Thin filmPower density010302 applied physicsPulse durationHiPIMSSurfaces and InterfacesGeneral ChemistryPartial pressure021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsSustained self-sputteringHigh-power impulse magnetron sputtering0210 nano-technologyRoom temperature depositionSurface and Coatings Technology

researchProduct

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

2008

Reactive magnetronMaterials science[SPI] Engineering Sciences [physics]Sputteringbusiness.industryOptoelectronicsPlasma diagnosticsOptical emission spectroscopyHigh-power impulse magnetron sputteringbusinessGlow discharge mass spectroscopy

researchProduct

PEPhysical Sciences and Engineering
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